7tb Temp File - How to Delete

I've got Mac M1 Ultra with a 50 tb external drive.

I'm trying to free up some room. ON DR, I have purge my cache files. However, I still have huge files.

I have screen shots of my DR cache, temp files on my Mac hard drive and Temp files on my external drive.

I'd like to delete this files but I have not idea if that will be a huge problem?

What is the best practice for this solution.

Sort them by date and delete the ones more than six months old. That's what I do. I also don't use cache except when necessary, and I only use it as User Cache. I also have all Performance Modes turned off when possible.